For highly stable, closed loop operation, piezoresistive sensors are applied directly to the moving structure and precisely measure the displacement of the stage platform. The very high sensitivity of these sensors provides optimum position stability and responsiveness as well as sub-nanometer resolution. The proprietary servo controller significantly improves the motion linearity compared to conventional piezoresistive sensor controllers.
Image shows the piezo controller (background) and the optional manual XY microscope stage with the PInano XYZ piezo stage on top (foreground).
0 comments: